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Products

OLED Deposition System

Products - OLED Equipment

R&D Type

3D Image
Diagram
Specification
High Vacuum Chamber : Low x 1.0E-7torr
Substrate Size : ＜ 200x200mm
Align : ≤±150㎛
Deposition Uniformity
Organic (NPB : ±3%), Metal (AL : ±5%)
Semi Auto Control
PLC System
Manual Deposition Control
Deposition Controller : Cygnus2 (Option)
Mono Color
1Chamber 4Zone Type (Organic & Metal Zone)
소량의 물질을 사용하여 소자 제작 가능

Composition

  • Deposition
    Chamber
  • Encapsulation
    Unit
  • Load Lock
    Chamber
  • Glove
    Box
  • Transfer
    Unit

Cluster Type

3D Image
Diagram
Specification
High Vacuum Chamber : Low x 1.0E-7torr
Substrate Size : ＜ 200x200mm
Align : ≤±150㎛, CCD Align : ≤±3㎛
Deposition Uniformity
Organic (NPB : ±2%), Metal (AL : ±3%)
Full Auto Control
PLC System & PC Control
Deposition Control
Deposition Controller : Cygnus2
Mono & Full Color (Option)
OLED 재료 및 소자 연구 개발용 장비

Composition

  • Load lock
    Chamber
  • Transfer
    Chamber
  • Plasma
    Chamber
  • Buffer
    Chamber
  • Organic
    Chamber (1~3)
  • Encapsulation
    Unit
  • Metal
    Chamber
  • Glove
    Box

Inline Type

Diagram
Specification
High Vacuum Chamber : Low x 1.0E-7torr
Substrate Size : ~ Gen. 2.0
Align : ≤±150㎛, CCD Align : ≤±3㎛
Deposition Uniformity
Organic (NPB : ±3%), Metal (AL : ±4%)
Full Auto Control
PLC System & PC Control
Deposition Control
Deposition Controller : Cygnus2
OLED Panel 양산용 장비

Composition

  • Load lock
    Chamber
  • Transfer
    Chamber
  • Plasma
    Chamber
  • Buffer
    Chamber
  • Organic
    Chamber
  • Encapsulation
    Unit
  • Metal
    Chamber
  • Glove
    Box

Effusion Cell

Diagram
Specification
Temperature : RT ~ 500℃, RT ~ 1400℃
Capacity : 4cc ~ 40cc
Material : Ta Wire, Ta Sheet
Crucible Material : Quartz, BN, PBN, Ti

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